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[IEEE 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Wuhan (2009.12.17-2009.12.20)] 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Design of weighting filters with dynamic uncertainty for ultra precision positioning stage
Xin Luo,, Xiu-lan Bao,, Xue-dong Chen,, Li-zhan Zeng,, Hua-yan Pu,, Yi-xi Ye,, Jin-cheng Zhu,Year:
2009
Language:
english
DOI:
10.1109/SPAWDA.2009.5428904
File:
PDF, 334 KB
english, 2009