Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
S. K. Gokce, S. Holmstrom, C. Hibert, S. Olcer, D. Bowman, H. UreyVolume:
20
Year:
2011
Language:
english
DOI:
10.1109/JMEMS.2010.2090507
File:
PDF, 388 KB
english, 2011