Fabrication and characterization of micromachined...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2005 Vol. 52; Iss. 3

Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films

Qifa Zhou, J. Cannata, R. Meyer, D. Van Tol, S. Tadigadapa, W. Hughes, K. Shung, S. Trolier-mckinstry
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Volume:
52
Year:
2005
Language:
english
DOI:
10.1109/TUFFC.2005.1417256
File:
PDF, 896 KB
english, 2005
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