Capacitive micromachined ultrasonic transducers with...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2003 Vol. 50; Iss. 11

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection

N. Hall, Wook Lee, F. Degertekin
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Volume:
50
Year:
2003
Language:
english
DOI:
10.1109/TUFFC.2003.1251141
File:
PDF, 1.30 MB
english, 2003
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