A numerical simulation on a pneumatic air table realized by...

Journal of Microelectromechanical Systems 1999 Vol. 8; Iss. 4

A numerical simulation on a pneumatic air table realized by micro-EDM

Hirata, T., Guenat, O.T., Akashi, T., Gretillat, M.-A., de Rooij, N.F.
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Volume:
8
Year:
1999
Language:
english
DOI:
10.1109/84.809068
File:
PDF, 404 KB
english, 1999
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