[IEEE Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - Honolulu, HI, USA (2004.06.17-2004.06.17)] Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004. - B/sub 2/H/sub 6/ plasma doping with "in-situ He pre-amorphization"
Sasaki, Y., Jin, C.G., Tamura, H., Mizuno, B., Higaki, R., Satoh, T., Majima, K., Sauddin, H., Takagi, K., Ohmi, S., Tsutsui, K., Iwai, H.Year:
2004
Language:
english
DOI:
10.1109/VLSIT.2004.1345466
File:
PDF, 182 KB
english, 2004