[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - A new higher-pressure sensor measured by heat transfer with two heaters
Ohji, H., Yutani, N., Taruya, M., Koshimizu, A., Tsutsumi, K., Fukami, T.Year:
2003
Language:
english
DOI:
10.1109/MEMSYS.2003.1189795
File:
PDF, 223 KB
english, 2003