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[IEEE ESSDERC 2013 - 43rd European Solid State Device Research Conference - Bucharest, Romania (2013.09.16-2013.09.20)] 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Effect of ions presence in the SiOCH inter metal dielectric structure
Rebuffat, B., Della Marca, V., Masson, P., Ogier, J.-L., Mantelli, M., Paulet, O., Lopez, L., Laffont, R.Year:
2013
Language:
english
DOI:
10.1109/ESSDERC.2013.6818858
File:
PDF, 535 KB
english, 2013