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An Additive Micromolding Approach for the Development of Micromachined Ceramic Substrates for RF Applications
K. Vaed, J. Florkey, S. Akbar, M. Madou, J. Lannutti, S. CahillVolume:
13
Year:
2004
Language:
english
DOI:
10.1109/JMEMS.2004.828737
File:
PDF, 993 KB
english, 2004