Determination of the Pull-Off Forces and Pull-Off Dynamics...

Determination of the Pull-Off Forces and Pull-Off Dynamics of an Electrostatically Actuated Silicon Disk

D. Bachmann, C. Hierold
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Volume:
17
Year:
2008
Language:
english
DOI:
10.1109/JMEMS.2008.918396
File:
PDF, 987 KB
english, 2008
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