Role of Nitrogen on the Gate Length Dependence of NBTI

Role of Nitrogen on the Gate Length Dependence of NBTI

T. Ho, D. Ang, L. Tang, T. Phua, C. Ng
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Volume:
30
Year:
2009
Language:
english
DOI:
10.1109/LED.2009.2022348
File:
PDF, 172 KB
english, 2009
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