[IEEE 2009 International Symposium on Optomechatronic Technologies (ISOT 2009) - Istanbul, Turkey (2009.09.21-2009.09.23)] 2009 International Symposium on Optomechatronic Technologies - Low cost polymer MEMS mirrors fabricated by photolithography and wet etching processes
Oohira, Fumikazu, Nakano, Tetsurou, Sasaki, Osamu, Terao, Kyouhei, Suzuki, TakaakiYear:
2009
Language:
english
DOI:
10.1109/ISOT.2009.5326102
File:
PDF, 1.22 MB
english, 2009