[IEEE ISPSD '05. The 17th International Symposium on Power Semiconductor Devices and ICs, 2005. - Santa Barbara, CA, USA (May 23-26, 2005)] Proceedings. ISPSD '05. The 17th International Symposium on Power Semiconductor Devices and ICs, 2005. - Above 500V class Superjunction MOSFETs fabricated by deep trench etching and epitaxial growth

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