Evanescent wave interference lithography for surface...

Evanescent wave interference lithography for surface nano-structuring

Zhou, Y, Hong, M H, Fuh, J Y H, Lu, L, Lukiyanchuk, B S
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
T129
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2007/t129/008
Date:
December, 2007
File:
PDF, 268 KB
english, 2007
Conversion to is in progress
Conversion to is failed