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Evanescent wave interference lithography for surface nano-structuring
Zhou, Y, Hong, M H, Fuh, J Y H, Lu, L, Lukiyanchuk, B SVolume:
T129
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2007/t129/008
Date:
December, 2007
File:
PDF, 268 KB
english, 2007