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Young’s modulus, Poisson’s ratio, and residual stress and strain in (111)-oriented scandium nitride thin films on silicon
Moram, M. A., Barber, Z. H., Humphreys, C. J., Joyce, T. B., Chalker, P. R.Volume:
100
Year:
2006
Language:
english
DOI:
10.1063/1.2217106
File:
PDF, 401 KB
english, 2006