[IEEE 1998 Fourth International High Temperature Electronics Conference. HITEC - Albuquerque, NM, USA (14-18 June 1998)] 1998 Fourth International High Temperature Electronics Conference. HITEC (Cat. No.98EX145) - SiC-AlN structure based MEMS
Korlyakov, A.V., Luchinin, V.V.Year:
1998
Language:
english
DOI:
10.1109/hitec.1998.676797
File:
PDF, 285 KB
english, 1998