Drift reduction in a scanning electrostatic force...

Measurement Science and Technology 2014 / 09 Vol. 25; Iss. 9

Drift reduction in a scanning electrostatic force microscope for surface profile measurement

Jia, Zhigang, Ito, So, Goto, Shigeaki, Hosobuchi, Keiichiro, Shimizu, Yuki, Gao, Wei
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Volume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/9/094001
Date:
September, 2014
File:
PDF, 1.18 MB
english, 2014
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