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[IEEE 2011 22nd Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2011.05.16-2011.05.18)] 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Establishing continuous flow manufacturing in a Wafertest-environment via value stream design
Keil, Sophia, Schneider, Germar, Eberts, Dietrich, Wilhelm, Kristina, Gestring, Ingo, Lasch, Rainer, Deutschlander, ArthurYear:
2011
Language:
english
DOI:
10.1109/asmc.2011.5898196
File:
PDF, 409 KB
english, 2011