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Fundamental Resolution Limits during Electron-Induced Direct-Write Synthesis
Arnold, Georg, Timilsina, Rajendra, Fowlkes, Jason, Orthacker, Angelina, Kothleitner, Gerald, Rack, Philip D., Plank, HaraldVolume:
6
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am5008003
Date:
May, 2014
File:
PDF, 2.65 MB
english, 2014