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A new sacrificial layer process for the fabrication of micromechanical systems
Cui, Zheng, Lawes, Ron AVolume:
7
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/7/3/012
Date:
September, 1997
File:
PDF, 420 KB
english, 1997