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Deep etching of glass wafers using sputtered molybdenum masks
Ceyssens, Frederik, Puers, RobertVolume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/6/067001
Date:
June, 2009
File:
PDF, 809 KB
english, 2009