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Chemistry of Diffusion Barrier Film Formation: Adsorption and Dissociation of Tetrakis(dimethylamino)titanium on Si(100)-2 × 1
Rodriguez-Reyes, J.C.F., Teplyakov, A.V.Volume:
111
Language:
english
Journal:
Journal of Physical Chemistry C
DOI:
10.1021/jp067929b
Date:
March, 2007
File:
PDF, 240 KB
english, 2007