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Thermal Oxidation of a Densely Packed Array of Vertical Si Nanowires
Kurstjens, R., Vos, I., Dross, F., Poortmans, J., Mertens, R.Volume:
159
Language:
english
Journal:
Journal of the Electrochemical Society
DOI:
10.1149/2.088203jes
Date:
January, 2012
File:
PDF, 368 KB
english, 2012