Low ohmic contact AlN/GaN HEMTs grown by MOCVD

Journal of Semiconductors 2013 / 11 Vol. 34; Iss. 11

Low ohmic contact AlN/GaN HEMTs grown by MOCVD

Gu, Guodong, Dun, Shaobo, Lü, Yuanjie, Han, Tingting, Xu, Peng, Yin, Jiayun, Feng, Zhihong
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Volume:
34
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/34/11/114004
Date:
November, 2013
File:
PDF, 541 KB
english, 2013
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