Subnanoscale Lanthanum Distribution in...

Chemistry of Materials 2010 / 06 Vol. 22; Iss. 12

Subnanoscale Lanthanum Distribution in Lanthanum-Incorporated Hafnium Oxide Thin Films Grown Using Atomic Layer Deposition

Wang, Tuo, Ekerdt, John G.
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Volume:
22
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm903386c
Date:
June, 2010
File:
PDF, 3.76 MB
english, 2010
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