Miniature ion-sorption vacuum pump with CNT field-emission electron source
Grzebyk, T, Górecka-Drzazga, AVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/1/015007
Date:
January, 2013
File:
PDF, 645 KB
english, 2013