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On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles
Godinho, V, Moskovkin, P, Álvarez, R, Caballero-Hernández, J, Schierholz, R, Bera, B, Demarche, J, Palmero, A, Fernández, A, Lucas, SVolume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/35/355705
Date:
September, 2014
File:
PDF, 2.66 MB
english, 2014