Elaboration of Ta2O5 Thin Films Using Electrostatic Spray Deposition for Microelectronic Applications
Lintanf, A., Mantoux, A., Blanquet, E., Djurado, E.Volume:
111
Language:
english
Journal:
Journal of Physical Chemistry C
DOI:
10.1021/jp0676585
Date:
April, 2007
File:
PDF, 733 KB
english, 2007