Elaboration of Ta2O5 Thin Films Using Electrostatic Spray...

Elaboration of Ta2O5 Thin Films Using Electrostatic Spray Deposition for Microelectronic Applications

Lintanf, A., Mantoux, A., Blanquet, E., Djurado, E.
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Volume:
111
Language:
english
Journal:
Journal of Physical Chemistry C
DOI:
10.1021/jp0676585
Date:
April, 2007
File:
PDF, 733 KB
english, 2007
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