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Experimental study of atmospheric pressure chemical vapor deposition of silicon carbide from methyltrichlorosilane
Papasouliotis, George D., Sotirchos, Stratis V.Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1999.0460
Date:
August, 1999
File:
PDF, 805 KB
english, 1999