Suspended Mechanical Structures Based on Elastic Silicon...

Suspended Mechanical Structures Based on Elastic Silicon Nanowire Arrays

San Paulo, Álvaro, Arellano, Noel, Plaza, Jose A., He, Rongrui, Carraro, Carlo, Maboudian, Roya, Howe, Roger T., Bokor, Jeff, Yang, Peidong
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Volume:
7
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl062877n
Date:
April, 2007
File:
PDF, 696 KB
english, 2007
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