Crack-free laser dicing of glass in the microelectronics industry
Savriama, Guillaume, Mendez, José, Barreau, Laurent, Boulmer-Leborgne, Chantal, Semmar, NadjibVolume:
25
Year:
2013
Language:
english
Journal:
Journal of Laser Applications
DOI:
10.2351/1.4821249
File:
PDF, 1.01 MB
english, 2013