Crack-free laser dicing of glass in the microelectronics...

Crack-free laser dicing of glass in the microelectronics industry

Savriama, Guillaume, Mendez, José, Barreau, Laurent, Boulmer-Leborgne, Chantal, Semmar, Nadjib
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Volume:
25
Year:
2013
Language:
english
Journal:
Journal of Laser Applications
DOI:
10.2351/1.4821249
File:
PDF, 1.01 MB
english, 2013
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