[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - A piezoresistive pressure sensor with improved sensitivity in low pressure condition
Yu, Hui-Yang, Qin, Ming, Huang, Jian-QiuYear:
2013
Language:
english
DOI:
10.1109/icsens.2013.6688390
File:
PDF, 1.18 MB
english, 2013