The energy distribution of ions bombarding electrode...

Journal of Applied Physics 1989 Vol. 65; Iss. 3

The energy distribution of ions bombarding electrode surfaces in rf plasma reactors

Metze, A., Ernie, D. W., Oskam, H. J.
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Volume:
65
Year:
1989
Language:
english
DOI:
10.1063/1.343002
File:
PDF, 906 KB
english, 1989
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