Thermal Decomposition of NF 3...

Chemistry of Materials 1996 / 01 Vol. 8; Iss. 6

Thermal Decomposition of NF 3 with Various Oxides

Vileno, Elizabeth, LeClair, Michael K., Suib, Steven L., Cutlip, Michael B., Galasso, Francis S., Hardwick, Steven J.
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Volume:
8
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm9504955
Date:
January, 1996
File:
PDF, 286 KB
english, 1996
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