Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage
Lee, ChaBum, Kim, Gyu Ha, Lee, Sun-KyuVolume:
22
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/22/10/105901
Date:
October, 2011
File:
PDF, 1.84 MB
english, 2011