Positive, chemically-amplified aromatic methacrylate resist...

Chemistry of Materials 1991 / 11 Vol. 3; Iss. 6

Positive, chemically-amplified aromatic methacrylate resist employing the tetrahydropyranyl protecting group

Taylor, Gary N., Stillwagon, Larry E., Houlihan, Francis M., Wolf, Thomas M., Sogah, Dotsevi Y., Hertler, Walter R.
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Volume:
3
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00018a017
Date:
November, 1991
File:
PDF, 2.21 MB
english, 1991
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