Conformal Organic−Inorganic Hybrid Network Polymer Thin Films by Molecular Layer Deposition using Trimethylaluminum and Glycidol
Gong, Bo, Peng, Qing, Parsons, Gregory N.Volume:
115
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp201186k
Date:
May, 2011
File:
PDF, 3.89 MB
english, 2011