Studies of ferroelectric film growth and capacitor...

Integrated Ferroelectrics 2001 / 01 Vol. 32; Iss. 1-4

Studies of ferroelectric film growth and capacitor interface processes via insitu analytical techniques and correlation with electrical properties

Krauss, Alan R., Auciello, Orlando, Dhote, Anil M., Im, Jaemo, Aggarwal, Sanjeev, Ramesh, Ramamoorthy, Irene, Eugene A., Gao, Ying, Mueller, Alex H.
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Volume:
32
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108215683
Date:
January, 2001
File:
PDF, 449 KB
english, 2001
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