Quantitative Calculation of Oxygen Incorporation in Sputtered IGZO Films and the Impact on Transistor Properties
Kwon, Seyeoul, Noh, Joo Hyon, Noh, Jiyong, Rack, Philip D.Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3530779
File:
PDF, 481 KB
english, 2011