Acoustic lens for capacitive micromachined ultrasonic transducers
Chang, Chienliu, Firouzi, Kamyar, Kyu Park, Kwan, Sarioglu, Ali Fatih, Nikoozadeh, Amin, Yoon, Hyo-Seon, Vaithilingam, Srikant, Carver, Thomas, Khuri-Yakub, Butrus TVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/8/085007
Date:
August, 2014
File:
PDF, 2.93 MB
english, 2014