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[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Study of gallium nitride surface treatment prior to PE CVD SiNx:H passivation
Parfenova, Maria A., Protasov, Dmitrii Yu., Malin, Timur V., Nastoviak, Artem E., Devyatova, Svetlana F., Zhuravlev, Konstantin S.Year:
2014
Language:
english
DOI:
10.1109/edm.2014.6882471
File:
PDF, 247 KB
english, 2014