Comparison of H 2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
Dolgov, A, Lopaev, D, Rachimova, T, Kovalev, A, Vasil'eva, A, Lee, C J, Krivtsun, V M, Yakushev, O, Bijkerk, FVolume:
47
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/47/6/065205
Date:
February, 2014
File:
PDF, 465 KB
english, 2014