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[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - FTIR research of protective PECVD coating for electro-optical devices
Sidorov, Denis I., Mushinsky, Sergey S., Shevtsov, Denis I., Pervadchuk, Vladimir P.Year:
2014
Language:
english
DOI:
10.1109/edm.2014.6882485
File:
PDF, 1.57 MB
english, 2014