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Simulation and Investigation of Factors Affecting High Aspect Ratio UV Embossing
Chan-Park, Mary B., Lam, Y. C., Laulia, P., Joshi, S. C.Volume:
21
Language:
english
Journal:
Langmuir
DOI:
10.1021/la035124e
Date:
March, 2005
File:
PDF, 796 KB
english, 2005