Molecular design of single-source precursors for 3-6 semiconductor films: control of phase and stoichiometry in indium selenide (InxSey) films deposited by a spray MOCVD process using single-source reagents
Gysling, Henry J., Wernberg, Alex A., Blanton, Thomas N.Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00022a028
Date:
July, 1992
File:
PDF, 2.71 MB
english, 1992