Development of Through-Wafer Interconnects for MEMS...

International Journal of Optomechatronics 2010 / 08 Vol. 4; Iss. 3

Development of Through-Wafer Interconnects for MEMS Deformable Mirrors

Diouf, Alioune, Stewart, Jason B., Cornelissen, Steven A., Bifano, Thomas G.
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Volume:
4
Language:
english
Journal:
International Journal of Optomechatronics
DOI:
10.1080/15599612.2010.510589
Date:
August, 2010
File:
PDF, 719 KB
english, 2010
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