Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2007 Vol. 25; Iss. 6
Highly selective zero-bias plasma etching of GaN over AlGaN
Schuette, Michael L., Lu, WuVolume:
25
Year:
2007
Language:
english
DOI:
10.1116/1.2796183
File:
PDF, 754 KB
english, 2007