[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October...

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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Atomic Layer Deposition of High-k Dielectric Layers on Ge and III-V MOS Channels

Delabie, Annelies, Alian, A., Bellenger, Florence, Brammertz, Guy, Brunco, David P., Caymax, Matty, Conard, Thierry, Franquet, A., Houssa, Michel, Sioncke, Sonja, Van Elshocht, S., Van Hemmen, J. L.,
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Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2986824
File:
PDF, 605 KB
english, 2008
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