Chloride-Based CVD Growth of Silicon Carbide for Electronic...

Chemical Reviews 2012 / 04 Vol. 112; Iss. 4

Chloride-Based CVD Growth of Silicon Carbide for Electronic Applications

Pedersen, Henrik, Leone, Stefano, Kordina, Olof, Henry, Anne, Nishizawa, Shin-ichi, Koshka, Yaroslav, Janzén, Erik
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Volume:
112
Language:
english
Journal:
Chemical Reviews
DOI:
10.1021/cr200257z
Date:
April, 2012
File:
PDF, 8.74 MB
english, 2012
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