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Experimental Characterization of an Inductively Coupled Plasma Discharge Using a Shape-Adjustable Coil
Leou, Keh-Chyang, Tsai, Szu-Che, Chang, Chai Hau, Chiang, Whe-Yi, Lin, Tsang-Lang, Tsai, Chuen-horngVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.4268
Date:
July, 1999
File:
PDF, 1003 KB
english, 1999